Crystallographic Orientation Dependent Reactive Ion Etching in Single Crystal Diamond

Crystallographic Orientation Dependent Reactive Ion Etching in Single Crystal Diamond.

Sculpturing desired shapes in single crystal diamond is ever more crucial in the realization of complex devices for nanophotonics, quantum computing, and quantum optics. The crystallographic orientation dependent wet etch of single crystalline silicon in potassium hydroxide (KOH) allows a range of shapes to be formed and has significant impacts on microelectromechanical systems (MEMS), atomic f...

Reactive ion etching

The reactive ion etching ofInP, InGaAs, and InAIAs in CClzF2/02 or C2R(/H2 discharges was investigated as a function of the plasma parameters pressure, power density, flow rate, and relative composition. The etch rates of these materials are a factor of 3-5 X faster in CC12F 2/0 2 (-600--1000 AminJ ) compared to CzHJH2 (160-320 AminI ). Significantly smoother morphologies are obtained with C2H6...

Deep Reactive Ion Etching (DRIE)

Fabrication of GaN-based Photonic Crystal Structures by Reactive Ion Etching 87 Fabrication of GaN-based Photonic Crystal Structures by Reactive Ion Etching

The fabrication of the 2D GaN-based photonic crystal structure at optical scales, a subμm scale in our case is very challenging. In our work, a double-etching method proved to be feasible to achieve the periodic GaN/air variation. The pattern was defined in a PMMA resist by electron-beam lithography and transferred to SiO2 by reactive ion etching (RIE) in a CF4 plasma and further into GaN by RI...

Orientation dependent surface stabilization on flame deposited diamond single crystals

In this study a model for the orientation dependent surface stabilization of diamond grown from the vapour phase is presented. The model is based on a first order broken bond analysis of the diamond crystal with additional considerations about surface reconstruction by dimer formation. Due to the formation of dimers, surface stabilization is expected for orientations corresponding to Miller ind...